Lumics, structured illumination microscopy to improve laser diode
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Measurement technology company Confovis (Jena, Germany) is providing comprehensive measurement data on process and product quality for laser diode manufacturer Lumics (Berlin, Germany). Lumics required a measurement system for the analysis of microstructures and surface features in the micron and nanometer range, improving the quality of the laser diodes produced and extending their product lifetime.
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"This [Confovis], especially, is what allows us to determine the depth during the etching process very precisely without stripping the coating from the wafer completely before measurement and re-coating it again after the measurement," says Kaebe. The parameters measured are compared with the calculated target values. These are heavily dependent on the epitaxy of the substrates and must to some extent be adjusted very individually. It is therefore useful to measure the etching depths or coating thicknesses again precisely between the process steps with the CLV150.
The measurement data recorded with the ConfoVIZ measurement software is subsequently transferred into the MountainsMap analysis software. There, among other things, the companies say it is possible to quickly and simply set up and create protocols for error analysis. Lumics says that with the Confovis system that they have been able to continuously increase process yields.
SOURCE: Confovis; http://www.confovis.com/company/news/newsdetail/article/messtechnik-fuer-schnelle-prozessueberwachung-in-der-diodenherstellung.html
